Fabrication of ZnO Nanorods by Atmospheric-Pressure Solid-Source CVD Using Ethanol-Assisted Low-Temperature Vaporization

摘要

We report a method to produce vapor species from ZnO powder for the fabrication of ZnO nanorods. Mixing ethanol vapor with the inert carrier gas substantially lowered the gasification temperature of ZnO. c-axis aligned ZnO nanorods were obtained by dispersing gold nanoparticles on Si substrates. The growth mechanism was identified as vapor-solid (VS) mechanism. Choice of the substrate materials and their surface morphology were both critically important to control the shapes and orientation of grown ZnO.